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|Technical University of Denmark - DTU Nano Machining using 0.0002" size end mills.
Photos provided by Frederik Bundgaard, Department of Micro and Nanotechnology at the at the Technical University of Denmark.
|Nano Machining is achieved at the Department of Micro and Nanotechnology at theat the Technical University of Denmark using Minitech's machine. Frederik Bundgaard is shown with a Minitech Mini-Mill/3Pro with 50K RPM precision spindle. End mills range from .0004" to 0.0002" and show no deviation in repeatability when machining.
The step motors controlling the stage employ micro-stepping, and a XYZ resolution ofaround 1µm is achieved. The repeatability of the system, including thespindle run-out, has been experimentally found to be less than 5µm when working on areas a few centimeters across, which is the dimension typically used for microfluidic systems.
a. Channel milled using a 200µm tool. The side channel is milled using a 25µm tool.The half circle pattern on the channel bottom stemming from the end mill is clearly seen.
b. 100µm wide and deep channel and through-hole 500µm in diameter. The surface of the channel bottom is slightly more rough than the sidewalls. The sides of the hole appear more rough than the channel.